Superior Antireflection Coating for a Silicon Cell with a Micronanohybrid Structure

Figure 2

SEM images of micronanohybrid silicon substrates fabricated by combinations of a fixed second-stage processing time (5 min) and various first-stage processing times: (a) 20 sec, (b) 25 sec, (c) 30 sec, (d) 35 sec, (e) 40 sec, and (f) 45 sec.

(a)

(b)

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(f)