International Journal of Photoenergy / 2014 / Article / Tab 1

Research Article

In-Line Sputtered Gallium and Aluminum Codoped Zinc Oxide Films for Organic Solar Cells

Table 1

The measured atomic percent of zinc, oxygen, gallium, and aluminum for the GAZO films deposited at RT, 100°C, 200°C, and 250°C.

Substrate temperature (°C)Element
Zn (at%)O (at%)Ga (at%)Al (at%)

RT45.1651.921.291.62
10045.3149.551.811.53
20044.4952.541.831.14
25043.3853.322.211.09