In-Line Sputtered Gallium and Aluminum Codoped Zinc Oxide Films for Organic Solar Cells

Table 1

The measured atomic percent of zinc, oxygen, gallium, and aluminum for the GAZO films deposited at RT, 100°C, 200°C, and 250°C.

Substrate temperature (°C)	Element
	Zn (at%)	O (at%)	Ga (at%)	Al (at%)
RT	45.16	51.92	1.29	1.62
100	45.31	49.55	1.81	1.53
200	44.49	52.54	1.83	1.14
250	43.38	53.32	2.21	1.09