Low-Cost ZnO:YAG-Based Metal-Insulator-Semiconductor White Light-Emitting Diodes with Various Insulators

Table 1

Parameters of deposition of insulator and ITO electrode layers by sputtering.

	Flow rate of argon (sccm)	Substrate temperature (°C)	Sputtering power (W)	Chamber pressure (mTorr)
SiO2	40	RT	60	4.23
ITO electrode	40	RT	50	3