Optical Properties of Spin-Coated TiO₂ Antireflection Films on Textured Single-Crystalline Silicon Substrates

Figure 4

SEM and EDS images of the spin-coated TiO₂ films for 1% solution. (a)-(b) Cross-sectional view. (c)-(d) Top view.

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(b)

(c)

(d)