Effect of Dopant Compensation on the Behavior of Dissolved Iron and Iron-Boron Related Complexes in Silicon

Figure 4

The ratio of N()/N(tot) as a function of temperature for CZ-2. Red circles refer to the experimental data, and the black dash line is a simulated line based on the function of N()/N(tot)  =  1/(1 + 4 × 10⁻³). The blue solid line represents a best fit which can be separated by the dark blue short dash dot line based on the function of 0.74/(1 + 2.6 × 10⁻⁵) for FeB and the dark blue short dash line based on the function of 0.16/(1 + 2 × 10⁻⁶) for FeB-P.