Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion

Figure 3

Variation of emitter sheet-resistances and thickness of barrier layer SiO₂ versus dry oxidation duration of six SE cells after one-step POCl₃ diffusion. The duration for SE1 and SE4 is 18 min, that for SE2 and SE5 is 25 min, and that for SE3 and SE6 is 35 min.