Wet-Chemical Surface Texturing of Sputter-Deposited ZnO:Al Films as Front Electrode for Thin-Film Silicon Solar Cells

Figure 2

Variation of visible transmission (), haze value (measured with the haze meter), and sheet resistance () of two-step textured AZO films as a function of the duration of the second etching step, for (a) HF/HCl etching and (b) HCl/HF etching.

(a)

(b)