Enhancement of Spectral Response in -:H Thin-Film Solar Cells with a-Si:H/c-Si:H P-Type Window Layers

Table 1

Parameters for different growth processes and H₂-plasma treatment.

Parameter	unit	a-Si:H(p)	μc-Si:H(p)	μc-:H(i)	μc-:H(n)	H2 Plasma
Power density	mW/cm^2	34	325	148	44	325
Growth pressure	pa	40	500	1200	600	500
H2 flow	sccm	50	800	1128–1960	1500	800
SiH4 flow	sccm	20	10	15	11	0
GeH4 flow	sccm	0	0	0.8	0	0
2% B2H6/H2 flow	sccm	10	5	0	0	0
1% PH3/H2 flow	sccm	0	0	0	5	0
CO2 flow	sccm	0	0	0	6	0