Investigation of Boron Thermal Diffusion from Atmospheric Pressure Chemical Vapor Deposited Boron Silicate Glass for N-Type Solar Cell Process Application

Figure 6

Sheet resistance dependence on BSG boron concentration as a parameter of diffusion temperatures. The sheet resistance can be controlled by the BSG boron concentration and diffusion conditions such as temperature and time. BRL is formed when the BSG concentration is higher than the concentration at the minimum sheet resistance.