Research Article
Comparison of the Electrical Properties of PERC Approach Applied to Monocrystalline and Multicrystalline Silicon Solar Cells
Table 2
Process sequence of PERC solar cells.
| Step number | Process description |
| 1 | Acid or alkaline texturing | 2 | POCl3 diffusion | 3 | PSG removing & edge isolation | 4 | SiN:H ARC on front side | 5 | Rear surface polishing | 6 | Rear passivation layer | 7 | Rear laser opening | 8 | Screen-printing and metallization |
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