Research Article

Atomic Layer Deposition of TiO2 Nanocoatings on ZnO Nanowires for Improved Photocatalytic Stability

Figure 3

Process flow for ALD TiO2. TDMAT is adsorbed onto a substrate and the excess purged by argon. Next, H2O enters the chamber and reacts with TDMAT in a self-limiting reaction; the excess H2O and by-products are purged by argon.