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International Journal of Polymer Science
Volume 2014, Article ID 574684, 5 pages
Research Article

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Key Laboratory for Micro/Nano Technology and System of Liao-Ning Province, Dalian University of Technology, Dalian 116024, China

Received 28 August 2013; Accepted 9 January 2014; Published 27 February 2014

Academic Editor: Haojun Liang

Copyright © 2014 Cui Yan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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