International Journal of Polymer Science / 2014 / Article / Tab 2

Research Article

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Table 2

Average residual stresses in PZT thin films with different thicknesses annealed at 500°C, 600°C, and 700°C for 8 min.

(mm) (MPa) (mm) (MPa) (mm) (MPa)
(nm) (nm) (nm)

PZT (  nm)8549/2111504650/3221154423/362223
PZT (  nm)9558/165147298/216744059/271211
PZT (  nm)14655/21684528/45433458/6711

denoted average roughness of curvature radius.

We are committed to sharing findings related to COVID-19 as quickly as possible. We will be providing unlimited waivers of publication charges for accepted research articles as well as case reports and case series related to COVID-19. Review articles are excluded from this waiver policy. Sign up here as a reviewer to help fast-track new submissions.