International Journal of Polymer Science / 2014 / Article / Tab 2

Research Article

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Table 2

Average residual stresses in PZT thin films with different thicknesses annealed at 500°C, 600°C, and 700°C for 8 min.

500°C600°C700°C
(mm) (MPa) (mm) (MPa) (mm) (MPa)
(nm) (nm) (nm)

PZT (  nm)8549/2111504650/3221154423/362223
PZT (  nm)9558/165147298/216744059/271211
PZT (  nm)14655/21684528/45433458/6711

denoted average roughness of curvature radius.

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