Table of Contents
International Journal of Plasma Science and Engineering
Volume 2008, Article ID 371812, 5 pages
http://dx.doi.org/10.1155/2008/371812
Research Article

Microstructures Formation by Fluorocarbon Barrel Plasma Etching

1Silicon Technology Unit. 2, Boulevard Frantz Fanon, BP 140 Alger-7 merveilles, Algiers 16200, Algeria
2Advanced Technologies Development Centre, cité 20 Aout 1956, BP 17, Baba Hassen, Algiers, Algeria

Received 27 March 2007; Revised 7 August 2007; Accepted 17 September 2007

Academic Editor: Rami A. Kishek

Copyright © 2008 A. El amrani et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

A. El amrani, R. Tadjine, and F. Y. Moussa, “Microstructures Formation by Fluorocarbon Barrel Plasma Etching,” International Journal of Plasma Science and Engineering, vol. 2008, Article ID 371812, 5 pages, 2008. https://doi.org/10.1155/2008/371812.