Absorption Line Profile of the Transition of Atomic Oxygen and Its Application to Plasma Monitoring
Figure 2
Absorption line profile of the transition of atomic oxygen observed at an rf power of 1.5βkW and a pressure of 30βmTorr. The open circles illustrated in (a) show the experimental result, and the solid curve is the data fitting using a Gaussian function with a temperature of 0.12βeV. The difference between the experimental result and the data fitting is shown in (b).
