International Journal of Spectroscopy / 2012 / Article / Tab 2

Research Article

Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Table 2

Growth parameters, thickness, and hydrogen concentration of amorphous silicon films.

Number
of samples
Thickness, nmGrowth temperature, °CHydrogen concentration, atomic per cents

1100200
29028010
311022515
47520030–35

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