Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Table 2

Growth parameters, thickness, and hydrogen concentration of amorphous silicon films.

Number; of samples	Thickness, nm	Growth temperature, °C	Hydrogen concentration, atomic per cents
1	100	20	0
2	90	280	10
3	110	225	15
4	75	200	30–35