Table of Contents
International Journal of Spectroscopy
Volume 2016, Article ID 2504217, 7 pages
Research Article

Double Pulse LIBS of Titanium-Based PVD-Coatings with Submicron Resolution

Physics Faculty, Belarusian State University, Prospekt Nezavisimosti 4, 220030 Minsk, Belarus

Received 20 November 2015; Accepted 15 February 2016

Academic Editor: Jozef Kaiser

Copyright © 2016 K. Ermalitskaia and E. Voropay. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The possibility for double pulse LIBS in the process of a direct layer-by-layer analysis of the titanium-based PVD-coatings on polished flat blank samples of steel and silicon and also of the TiAlN/TiN-coating on a milling cutter is considered. A method is proposed to control thickness of the radiation evaporated layer by defocusing the laser beam with respect to the surface, making it possible to attain the depth resolution of 0.1 μm. The Ti and Ti-Zr-coatings produced using the ion-assisted condensation method and subjected to streams of the nitrogen plasma in a magnetic-plasma compressor are studied.