Research Article
Double Pulse LIBS of Titanium-Based PVD-Coatings with Submicron Resolution
Table 1
Analyzed samples and their main characteristics.
| | Number of the sample | Sample name | Material of the coating | Thickness of the coating | Coating method |
| | 1 | Analysis blank sample (steel) | Ti-Zr | 1-2 m | Ion-assisted condensation | | 2 | Blank sample (steel) | Ti-Zr/TiN/ZrN/steel |
10–15 m | Nitrogen plasma streams | | 3 | Silicon plates | Ti | | Ion-assisted condensation | | 4 | Steel milling cutter | (TiAlN/TiN) | Unknown | Physical vapor deposition |
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