Double Pulse LIBS of Titanium-Based PVD-Coatings with Submicron Resolution

Table 3

Layer thickness and elemental content in PVD-coating on steel milling cutter.

Layer	1	2	3	4	5	6	7	8	9	10
, μm	1.73	0.40	0.27	0.24	0.46	0.20	0.48	0.21	0.37	0.40
, %	29–2.9	34	41	47	52	56	62	66	61	73
, %	7–0.6	9	11	12	14	15	16	18	16	19

Within the deepest layer with a thickness of 1.73 m the content of titanium and aluminum linearly decreases with a growing depth.