Table of Contents
ISRN Mechanical Engineering
Volume 2011, Article ID 413231, 15 pages
http://dx.doi.org/10.5402/2011/413231
Review Article

Recent Developments and Research Issues in Microultrasonic Machining

Mechanical and Industrial Engineering Department, Indian Institute of Technology Roorkee, Roorkee, Uttarakhand 247667, India

Received 20 January 2011; Accepted 13 February 2011

Academic Editors: V. P. Astakhov, S. Cartmell, and K.-H. Chang

Copyright © 2011 Vivek Jain et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. T. Masuzawa, “State of the art of micromachining,” CIRP Annals—Manufacturing Technology, vol. 49, no. 2, pp. 473–488, 2000. View at Google Scholar · View at Scopus
  2. E. Gentili, L. Tabaglio, and F. Aggogeri, “Review on micromachining techniques,” in Proceedings of the 7th International Conference on Advance Manufacturing Systems and Technology (AMST '05).
  3. J. J. Allen, Micro Electro Mechanical System Design, CRC Press, Boca Raton, Fla, USA; Taylor & Francis, London, UK, 2005.
  4. R. T. Howe and R. S. Muller, “Polycrystalline silicon micromechanical beams,” Journal of the Electrochemical Society, vol. 130, no. 6, pp. 1420–1423, 1983. View at Google Scholar · View at Scopus
  5. E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Münchmeyer, “Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process),” Microelectronic Engineering, vol. 4, no. 1, pp. 35–56, 1986. View at Google Scholar
  6. P. J. French, P. T. J. Gennissen, and P. M. Sarro, “New silicon micromachining techniques for microsystems,” Sensors and Actuators, A, vol. 62, no. 1–3, pp. 652–662, 1997. View at Google Scholar · View at Scopus
  7. F. Z. Fang, K. Liu, T. R. Kurfess, and G. C. Lim, “Tool-based micro machining and applications,” in MEMS, MEMS/NEMS, Handbook Techniques and Applications, vol. 3, Springer, Berlin, Germany, 2005. View at Google Scholar
  8. J. L. Liow, “Mechanical micromachining: a sustainable micro-device manufacturing approach?” Journal of Cleaner Production, vol. 17, no. 7, pp. 662–667, 2009. View at Publisher · View at Google Scholar · View at Scopus
  9. C. K. Walker, G. Narayanan, H. Knoepfle et al., “Laser micromachining of silicon: a new technique for fabricating high quality terahertz waveguide components,” in Proceedings of the 8th international symposium on Space Terahertz Technology, Harvard University, March 1997.
  10. A. A. Tseng, Y. T. Chen, C. L. Chao, K. J. Ma, and T. P. Chen, “Recent developments on microablation of glass materials using excimer lasers,” Optics and Lasers in Engineering, vol. 45, no. 10, pp. 975–992, 2007. View at Publisher · View at Google Scholar · View at Scopus
  11. J. P. Desbiens and P. Masson, “ArF excimer laser micromachining of Pyrex, SiC and PZT for rapid prototyping of MEMS components,” Sensors and Actuators, A, vol. 136, no. 2, pp. 554–563, 2007. View at Publisher · View at Google Scholar · View at Scopus
  12. Z. Y. Yu, K. P. Rajurkar, and H. Shen, “High aspect ratio and complex shaped blind micro holes by micro EDM,” CIRP Annals—Manufacturing Technology, vol. 51, no. 1, pp. 359–362, 2002. View at Google Scholar
  13. S. Mahendran, R. Devarajan, T. Nagarajan, and A. Majdi, “A Review of Micro-EDM,” in Proceedings of the International Multi Conference of Engineers and Computer Scientists, vol. 2, Hong Kong, March 2010.
  14. B. Bhattacharyya, M. Malapati, and J. Munda, “Experimental study on electrochemical micromachining,” Journal of Materials Processing Technology, vol. 169, no. 3, pp. 485–492, 2005. View at Publisher · View at Google Scholar · View at Scopus
  15. R. Singh, M. J. Alberts, and S. N. Melkote, “Characterization and prediction of the heat-affected zone in a laser-assisted mechanical micromachining process,” International Journal of Machine Tools and Manufacture, vol. 48, no. 9, pp. 994–1004, 2008. View at Publisher · View at Google Scholar · View at Scopus
  16. J. C. Hung, B. H. Yan, H. S. Liu, and H. M. Chow, “Micro-hole machining using micro-EDM combined with electropolishing,” Journal of Micromechanics and Microengineering, vol. 16, no. 8, pp. 1480–1486, 2006. View at Publisher · View at Google Scholar · View at Scopus
  17. I. Yang, M. S. Park, and C. N. Chu, “Micro ECM with ultrasonic vibrations using a semi-cylindrical tool,” International Journal of Precision Engineering and Manufacturing, vol. 10, no. 2, pp. 5–10, 2009. View at Publisher · View at Google Scholar · View at Scopus
  18. T. Endo, T. Tsujimoto, and K. Mitsui, “Study of vibration-assisted micro-EDM-The effect of vibration on machining time and stability of discharge,” Precision Engineering, vol. 32, no. 4, pp. 269–277, 2008. View at Publisher · View at Google Scholar · View at Scopus
  19. S. Koshimizu and I. Iansaki, “Hybrid machining of hard and brittle materials,” Journal of Mechanical Working Technology, vol. 17, pp. 333–341, 1988. View at Google Scholar · View at Scopus
  20. T. B. Thoe, D. K. Aspinwall, and M. L. H. Wise, “Review on ultrasonic machining,” International Journal of Machine Tools and Manufacture, vol. 38, no. 4, pp. 239–255, 1998. View at Google Scholar · View at Scopus
  21. D. Kremer, S. M. Saleh, S. R. Ghabrial, and A. Moisan, “The State of the Art of Ultrasonic Machining,” CIRP Annals—Manufacturing Technology, vol. 30, no. 1, pp. 107–110, 1981. View at Publisher · View at Google Scholar · View at Scopus
  22. X. Q. Sun, T. Masuzawa, and M. Fujino, “Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines,” in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS '96), pp. 312–317, 1996.
  23. B. Ghahramani and Z. Y. Wang, “Precision ultrasonic machining process: a case study of stress analysis of ceramic (Al2O3),” International Journal of Machine Tools and Manufacture, vol. 41, no. 8, pp. 1189–1208, 2001. View at Publisher · View at Google Scholar · View at Scopus
  24. T. Masuzawa and H. K. Tönshoff, “Three-dimensional micromachining by machine tools,” CIRP Annals —Manufacturing Technology, vol. 46, no. 2, pp. 621–628, 1997. View at Google Scholar · View at Scopus
  25. K. Egashira, T. Masuzawa, M. Fujino, and X. Q. Sun, “Application of USM to micromachining by on-the-machine tool fabrication,” International Journal of Electrical Machining, no. 2, pp. 31–36, 1997. View at Google Scholar
  26. K. Egashira and T. Masuzawa, “Microultrasonic machining by the application of workpiece vibration,” CIRP Annals—Manufacturing Technology, vol. 48, no. 1, pp. 131–134, 1999. View at Google Scholar · View at Scopus
  27. C. Y. Khoo, E. Hamzah, and I. Sudin, “A review on the rotary ultrasonic machining of advanced ceramics,” Jurnal Mekanikal, no. 25, pp. 9–23, 2008. View at Google Scholar
  28. M. Komaraiah and P. N. Reddy, “A study on the influence of work piece properties in ultrasonic machining,” International Journal of Machine Tools and Manufacture, vol. 33, no. 3, pp. 495–505, 1993. View at Google Scholar
  29. A. R. Jones and J. B. Hull, “Ultrasonic flow polishing,” Ultrasonics, vol. 36, no. 1–5, pp. 97–101, 1998. View at Google Scholar · View at Scopus
  30. A. C. Wang, B. H. Yan, X. T. Li, and F. Y. Huang, “Use of micro ultrasonic vibration lapping to enhance the precision of microholes drilled by micro electro-discharge machining,” International Journal of Machine Tools and Manufacture, vol. 42, no. 8, pp. 915–923, 2002. View at Publisher · View at Google Scholar · View at Scopus
  31. R. Singh and J. S. Khamba, “Ultrasonic machining of titanium and its alloys: a review,” Journal of Materials Processing Technology, vol. 173, no. 2, pp. 125–135, 2006. View at Publisher · View at Google Scholar · View at Scopus
  32. T. Kuriyagawa, T. Shirosawa, O. Saito, and K. Syoji, “Micro ultrasonic abrasive machining for three-dimensional milli-structures of hard-brittle materials,” in Proceedings of the 16th ASPE Annual Meeting, pp. 525–528, 2001.
  33. A. Curodeau, J. Guay, D. Rodrigue, L. Brault, D. Gagné, and L. P. Beaudoin, “Ultrasonic abrasive μ-machining with thermoplastic tooling,” International Journal of Machine Tools and Manufacture, vol. 48, no. 14, pp. 1553–1561, 2008. View at Publisher · View at Google Scholar
  34. K. Egashira, T. Taniguchi, H. Tsuchiya, and M. Miyazaki, “Microultrasonic machining using multitools,” in Proceedings of the 7th International Conference on Progress Machining Technology (ICPMT '04), pp. 297–301, December 2004.
  35. Instruction manual for stationary SONIC-MILL 500W Model 2002 (U.S.A).
  36. F. B. Gary, Book on Non Traditional Manufacturing Processes, Marcel Dekker, New York, NY, USA, 1987.
  37. R. Jadoun, K. Pradeep, and B. K. Mishra, “Taguchi’s optimization of process parameters for production accuracy in ultrasonic drilling of engineering ceramics,” in Production Engineering, vol. 3, pp. 243–253, German Academic Society for Production Engineering, Springer, Berlin, Germany, 2009. View at Google Scholar
  38. R. S. Jadoun, P. Kumar, B. K. Mishra, and R. C. S. Mehta, “Optimization of process parameters for ultrasonic drilling of advanced engineering ceramics using the Taguchi approach,” Engineering Optimization, vol. 38, no. 7, pp. 771–787, 2006. View at Publisher · View at Google Scholar · View at Scopus
  39. M. Adithan and V. C. Venkatesh, “Study of the performance characteristics of an ultrasonic drilling head,” Wear, vol. 33, no. 2, pp. 261–270, 1975. View at Google Scholar · View at Scopus
  40. Z. Yu, X. Hu, and K. P. Rajurkar, “Influence of debris accumulation on material removal and surface roughness in micro ultrasonic machining of silicon,” CIRP Annals—Manufacturing Technology, vol. 55, no. 1, pp. 201–204, 2006. View at Publisher · View at Google Scholar · View at Scopus
  41. Z. Y. Yu, K. P. Rajurkar, and A. Tandon, “Study of 3D micro-ultrasonic machining,” Journal of Manufacturing Science and Engineering, Transactions of the ASME, vol. 126, no. 4, pp. 727–732, 2004. View at Publisher · View at Google Scholar · View at Scopus
  42. J. J. Boy, E. Andrey, A. Boulouize, and C. Khan-Malek, “Developments in microultrasonic machining (MUSM) at FEMTO-ST,” International Journal of Advanced Manufacturing Technology, vol. 47, no. 1–4, pp. 37–45, 2010. View at Publisher · View at Google Scholar · View at Scopus
  43. X. Q. Sun, T. Masuzawa, and M. Fujino, “Micro ultrasonic machining and its applications in MEMS,” Sensors and Actuators, A, vol. 57, no. 2, pp. 159–164, 1996. View at Publisher · View at Google Scholar · View at Scopus
  44. K. Egashira, K. Mizutani, and T. Nagao, “Ultrasonic vibration drilling of microholes in glass,” CIRP Annals—Manufacturing Technology, vol. 51, no. 1, pp. 339–342, 2002. View at Google Scholar · View at Scopus
  45. C. Zhang, R. Rentsch, and E. Brinksmeier, “Advances in micro ultrasonic assisted lapping of microstructures in hard-brittle materials: a brief review and outlook,” International Journal of Machine Tools and Manufacture, vol. 45, no. 7-8, pp. 881–890, 2005. View at Publisher · View at Google Scholar · View at Scopus
  46. T. Li and Y. B. Gianchandani, “A die-scale micromachining process for bulk PZT and its application to in-plane actuators,” in Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), pp. 387–390, February 2005.
  47. X. Hu, Z. Yu, and K. P. Rajurkar, “State-of-the-art review of micro ultrasonic machining,” in Proceedings of the International Conference on Manufacturing Science and Engineering (MSEC '06), October 2006.