Recent Developments and Research Issues in Microultrasonic Machining

Table 1

Common attributes of different micromachining techniques [2, 3, 8].

Features	Micromachining techniques
	Bulk-surface	LIGA	Laser	Micro-EDM	Micro-ECM	Micromilling	Micro-USM
Minimum Dimension	+	++	++	++	+	+	++
Accuracy	+	++	±	+	+	±	+
Aspect ratio	−	++	±	±	±	±	±
MRR	Depends upon process	Depends upon process	+	++	+	+	+
Thermal damage to the surface	No	No	Yes	Yes	Yes	Yes	No
Geometrical freedom	2D	2D	3D	3D	3D	3D	3D
Material	Very limited material suite	Very limited material suite	Metal, polymers, ceramics	Only conductive materials	Only conductive materials	Metal, polymer	Conductive, nonconductive, hard, and brittle materials

++ Very good; + good; ± fair.