Review Article
Recent Developments and Research Issues in Microultrasonic Machining
Table 3
Micro-USM process capabilities.
| Sr. no. | Features | Capability | Reported by |
| (1) | Minimum diameter, μm | 5 | Egashira et al. (1997) [25] | (2) | Maximum (Depth × Length), μm | 60 μm × 500 μm | Sun et al. (1996) [22] | (3) | Max. no. of features on single tool | 16 microtools of 18 μm diameter | Egashira et al. (2004) [34] | (4) | Others | Array of pillars (280 μm diameter and 6000 μm depth) | Boy et al. (2010) [42] |
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