Review Article

Recent Developments and Research Issues in Microultrasonic Machining

Table 3

Micro-USM process capabilities.

Sr. no.FeaturesCapabilityReported by

(1)Minimum diameter, μm5Egashira et al. (1997) [25]
(2)Maximum (Depth × Length), μm60 μm × 500 μmSun et al. (1996) [22]
(3)Max. no. of features on single tool16 microtools of 18 μm diameterEgashira et al. (2004) [34]
(4)OthersArray of pillars (280 μm diameter and 6000 μm depth)Boy et al. (2010) [42]