Table of Contents
ISRN Nanotechnology
Volume 2011 (2011), Article ID 846187, 7 pages
http://dx.doi.org/10.5402/2011/846187
Research Article

Role of Sandwich Cu Layer in and Effect of Self-Bias on Nanomechanical Properties of Copper/Diamond-Like Carbon Bilayer Films

1Physics of Energy Harvesting Division, National Physical Laboratory (CSIR), Dr. K.S. Krishnan Road, New Delhi 110012, India
2Department of Physics, Indian Institute of Technology Delhi, New Delhi 110016 , India

Received 10 March 2011; Accepted 9 April 2011

Academic Editors: C. A. Charitidis, S. Dub, B. R. Kimball, and B. Pignataro

Copyright © 2011 Neeraj Dwivedi et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

The role of sandwich Cu layer in and effect of self-bias on structural and nanomechanical properties of Cu/DLC bilayer films have been explored. Cu/DLC bilayer films were grown, under varied self-bias from 125 to 225 V, using hybrid system involving radio-frequency- (RF-) plasma-enhanced chemical vapor deposition and RF-sputtering units. Surface topography and mean roughness was studied by atomic force microscope and then correlated with mechanical properties. The addition of sandwich Cu layer in DLC reduces its residual stress and does not affect bilayer film hardness and elastic modulus. Load versus displacement was also employed to estimate various other mechanical parameters, which further correlated with self-bias and structural properties. These Cu/DLC bilayer films seem to be a potential candidate for various industrial applications such as hard and protective coating on cutting tools, solar cells, and wear resistance coating on magnetic storage media.