Thermodynamics and Oxidation Behaviour of Crystalline Silicon Carbide (3C) with Atomic Oxygen and Ozone

<table>Flowchart for subroutine program SubOXID to compute equilibrium ozone/atomic oxygen activity and standard free energy change of reaction with temperature.</table>

International Scholarly Research Notices

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Figure 1

Figure 1: Thermodynamics and Oxidation Behaviour of Crystalline Silicon Carbide (3C) with Atomic Oxygen and Ozone 