Thermodynamics and Oxidation Behaviour of Crystalline Silicon Carbide (3C) with Atomic Oxygen and Ozone

Figure 5

Equilibrium diagram of SiC oxidation with atomic oxygen (O) at (a) log𝑃_CO2=0, log𝑃_CO=0, and log𝑃_SiO=0, (b) log𝑃_CO2=−3, log𝑃_CO=−3, and log𝑃_SiO=−3, (c) log𝑃_CO2=−7, log𝑃_CO=−7, and log𝑃_SiO=−7, and (d) log𝑃_CO2=−10, log𝑃_CO=−10, and log𝑃_SiO=−10.

(a)

(b)

(c)

(d)