Thermodynamics and Oxidation Behaviour of Crystalline Silicon Carbide (3C) with Atomic Oxygen and Ozone

Table 1

Reactions of SiC with O and O₃.

	Reactions with atomic oxygen	Reactions with ozone
1	SiC + 4O → SiO2 + CO2	SiC + 4/3O3 → SiO2 + CO2
2	SiC + 2O → SiO + CO	SiC + 2/3O3 → SiO + CO
3	SiC + 3O → SiO2 + CO	SiC + O3 → SiO2 + CO
4	SiC + 2O → SiO2 + C	SiC +2/3O3 → SiO2 + C
5	SiC + 3O → SiO + CO2	SiC + O3 → SiO + CO2
6	SiC + O → SiO + C	SiC + 1/3O3 → SiO + C
7	SiC + 2O → Si + CO2	SiC + 2/3O3 → Si + CO2
8	SiC + O → Si + CO	SiC + 1/3O3 → Si + CO