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ISRN Optics
Volume 2012 (2012), Article ID 151092, 3 pages
Research Article

Plastic Deformation in Profile-Coated Elliptical KB Mirrors

1X-ray Science Division, Argonne National Laboratory, Argonne, IL 60439, USA
2National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
3Synchrotron Soleil, BP 48 Saint-Aubin, 91192 Gif-sur-Yvette, France
4Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA

Received 19 July 2012; Accepted 8 August 2012

Academic Editors: K. Hane and S. R. Restaino

Copyright © 2012 Chian Liu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.