Research Article
Production of Nanopowders of Metal Oxides Using Pulsed Electron Beam in Low Pressure Gas
Table 1
Installation characteristics of the “Nanobeam 2”.
| No. | Characteristics | Value |
| 1 | Power consumption, κVA, no more than | 5 | 2 | Power supply | 380 V (3 ph.), 50 Hz | 3 | Pulse width, μs | 50–100 | 4 | Pulse repetition rate, pps | up to 500 | 5 | Accelerating voltage, kV | up to 40 | 6 | Beam current on a target, A | 0,46 | 7 | Beam diameter on a targets, mm | 1,5 | 8 | Pressure limits of regulation in the evaporation chamber, Pa |
10-1-105 | 9 | Inleakage gas speed to the the evaporation chamber, l/hour | to 63 | 10 | Weights of installation, kg, no more than | 700 | 11 | Area of placing of installation, m*m | 3*3 |
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