Characterization and Modelling of Circular Piezoelectric Micro Speakers for Audio Acoustic Actuation

Table 1

Transducer design variables.

Meaning	Symbol	Units	Min. value	Max. value
Sustrate thickness	𝑡sus	mm	1	10
Si thickness	𝑡Si	mm	1	10
SiO2 thickness	𝑡SiO2	μm	1	100
Electrode thickness	𝑡el	μm	1	100
ZnO thickness	𝑡piezo	μm	1	500
Radius	R	mm	0.75	12.5
Top electrode radius	𝑅𝑒	(% of R)	1	100
Bottom hole radius	𝑅ℎ	(% of R)	1	100