Novel Robust Design Method of Multilayer Optical Coatings

Table 1

Properties of the neutral beam splitter (𝑛₀=1.0, 𝑛_𝐿=1.45, 𝑛_𝐻=2.35, 𝑛_𝑠=1.52).

d(nm)		Conventional design 1	Conventional design 2	Sensitivity control design 1	Sensitivity control design 2
Substrate		Massive
1	H	9.416	7.836	11.3461	16.6216
2	L	70.040	55.305	35.4709	28.0701
3	H	24.597	31.419	113.1081	139.6693
4	L	87.878	23.621	164.3371	7.5744
5	H	21.941	82.439	72.6831	135.0514
6	L	87.775	44.960	93.5646	85.1263
7	H	58.533	26.888	35.5054	54.3485
8	L	114.755	86.482		91.1863
9	H	57.279	55.507		215.1898
10	L	65.784	115.317		87.6283
11	H		52.603
12	L		64.619
Air		Massive
√𝐹		0.0200	0.0026	0.1046	0.0832
𝑆		0.1391	0.1466	0.0603	0.0595
√𝐹𝐹		0.3735	0.3829	0.2668	0.2577