Research Article

Influence of Sound Vibration on Diamond-Like Carbon Deposition Rate

Figure 3

Deposition rate as a function of frequency of vibration ( 𝑇 s u b = 1 0 0 0 C , 𝑇 a c t = 1 9 0 0 C , 𝑃 c h = 2 5 T o r r , and 𝑑 = 5 m m ).
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