Research Article

Influence of Sound Vibration on Diamond-Like Carbon Deposition Rate

Figure 6

EDX analysis of coating on substrate with vibration at top and without vibration at bottom ( 𝑇 s u b = 1 0 0 0 C , 𝑇 a c t = 1 9 0 0 C , 𝑃 c h = 2 5 t o r r , and 𝐿 g a p = 5 m m ).
676751.fig.006a
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