Influence of Oxygen on Zinc Oxide Films Fabricated by Ion-Beam Sputter Deposition

Table 2

The XRD spectra of the ZnO samples, from ZnO-10 to ZnO-20, fitted by Gauss functions and represented by intensities, double diffraction angles, and FHWMs.

Sample	Intensity (a.u.)	2𝜃 (deg)	FWHM (deg)
ZnO-10	349.5	34.04	0.505
ZnO-12	749.1	34.17	0.479
ZnO-15	664.2	34.12	0.481
ZnO-20	583.0	34.08	0.493