Modeling and Simulation of a Chemical Vapor Deposition

Table 9

Computed and experimental fitted parameters from UG simulations.

𝑇	𝜆 (fitted)	𝜆 (interpolated)	Ratio (SiC : C) (computed with UG)
400	1/2⋅10^−8	—	2.4 : 1
500	—	0.35⋅10^−8	1.85 : 1
600	1/4⋅10^−8	—	1.5 : 1
700	—	0.171⋅10^−8	1.211 : 1
800	1/8⋅10^−8	—	1.1 : 1