Table of Contents
Journal of Atomic, Molecular, and Optical Physics
Volume 2011, Article ID 295304, 6 pages
Research Article

Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry

1Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestine
2Physics Department, University of Missouri-Kansas City, Kansas City, MO 64110, USA

Received 6 June 2011; Accepted 2 August 2011

Academic Editor: Edward E. Eyler

Copyright © 2011 Taher M. El-Agez et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Oxygen-treated trimethylsilane (TMS) plasma-polymerized films are investigated using rotating polarizer and analyzer ellipsometer. Aging process and composition of the samples are studied. Coordinated X-ray photoelectron spectroscopy (XPS) depth profiling studies on these films is presented for more detailed understanding of the aging process as well as the modeling of these films.