Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry

Table 2

The effective medium approximation applied on oxygen-treated TMS films after aging for 1 day. The obtained atomic ratios are compared to XPS results.

𝜆 (nm)	𝑛eff	𝑛(a-SiC:H)	𝑛(a-SiO2)	𝑣1	𝑣2	C/Si		O/Si
						XPS	EMA	XPS	EMA
700	1.672	1.753	1.455	0.55	0.45	NA	2	NA	0.56
600	1.681	1.787	1.458	0.68	0.32	NA	1.85	NA	0.64
500	1.709	1.82	1.462	0.7	0.3	NA	1.9	NA	0.62
420	1.749	1.847	1.468	0.75	0.25	NA	2	NA	0.53