Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity

<table>Measured X-ray reflectivity profile (at <svg height="11.375" id="M233" style="vertical-align:-0.1638pt" version="1.1" viewbox="0 0 62.924999 11.375" width="62.924999" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg> eV) along with simulated profile of [Mo (2.7 nm)/Si (6.3 nm)]<sub>5</sub> ML.</table>

Journal of Atomic and Molecular Physics

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Figure 7

Figure 7: Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity 

Figure 7 | Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity 