Table of Contents
Journal of Coatings
Volume 2013 (2013), Article ID 519140, 6 pages
http://dx.doi.org/10.1155/2013/519140
Research Article

Fabrication of Transparent Conductive Zinc Oxide Co-Doped with Fluorine and Zirconium Thin Solid Films by Ultrasonic Chemical Pyrolysis: Effects of Precursor Solution Aging and Substrate Temperature

Escuela Superior de Ingeniería Mecánica y Eléctrica Unidad Ticomán, Instituto Politécnico Nacional, 07340 Mexico, DF, Mexico

Received 1 April 2013; Revised 31 May 2013; Accepted 9 June 2013

Academic Editor: Mamoru Furuta

Copyright © 2013 Luis Castañeda. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. P. S. Patil, “Versatility of chemical spray pyrolysis technique,” Materials Chemistry and Physics, vol. 59, no. 3, p. 185, 1999. View at Publisher · View at Google Scholar
  2. S. A. Aly, N. Z. El Sayed, and M. A. Kaid, “Effect of annealing on the optical properties of thermally evaporated ZnO films,” Vacuum, vol. 61, no. 1, pp. 1–7, 2001. View at Publisher · View at Google Scholar · View at Scopus
  3. T. Minani, T. Yamamoto, and T. Miyata, “Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering,” Thin Solid Films, vol. 366, pp. 63–68, 2000. View at Publisher · View at Google Scholar
  4. K. Kobayashi, T. Matsubara, S. Matsushima, S. Shirakata, S. Isomura, and G. Okada, “Preparation of c-axis oriented ZnO films by low-pressure organometallic chemical vapor deposition,” Thin Solid Films, vol. 266, no. 2, pp. 106–109, 1995. View at Google Scholar · View at Scopus
  5. T. Kawaharamura and S. Fujita, “An approach for single crystalline zinc oxide thin films with fine channel mist chemical vapor deposition method,” Physica Status Solidi C, vol. 5, no. 9, pp. 3138–3140, 2008. View at Publisher · View at Google Scholar · View at Scopus
  6. Y. Natsume and H. Sakata, “Zinc oxide films prepared by sol-gel spin-coating,” Thin Solid Films, vol. 372, no. 1, pp. 30–36, 2000. View at Publisher · View at Google Scholar · View at Scopus
  7. L. Castañeda, M. Avendaño-Alejo, H. Gomez, M. de la L. Olvera, and A. Maldonado, “Physical characterization of ruthenium-doped zinc oxide thin solid films deposited by the sol-gel technique: gas-sensing performance in a propane atmosphere,” Sensor Letters, vol. 11, no. 2, pp. 286–293, 2013. View at Publisher · View at Google Scholar
  8. M. Krunks and E. Mellikov, “Zinc oxide thin films by the spray pyrolysis method,” Thin Solid Films, vol. 270, no. 1-2, pp. 33–36, 1995. View at Google Scholar · View at Scopus
  9. L. Castañeda, A. García-Valenzuela, E. P. Zironi, J. Cañetas-Ortega, M. Terrones, and A. Maldonado, “Formation of indium-doped zinc oxide thin films using chemical spray techniques: the importance of acetic acid content in the aerosol solution and the substrate temperature for enhancing electrical transport,” Thin Solid Films, vol. 503, no. 1-2, pp. 212–218, 2006. View at Publisher · View at Google Scholar · View at Scopus
  10. J. B. Mooney and S. B. Radding, “Spray pyrolysis processing,” Annual Review of Materials Science, vol. 12, pp. 81–101, 1982. View at Publisher · View at Google Scholar
  11. L. Castañeda, A. Maldonado, J. C. Cheang-Wong, J. Rodriguez-Baez, M. López-Fuentes, and M. de la L. Olvera, “Chemical spray pyrolysis deposited fluorine-doped zinc oxide thin films: effect of acetic acid content in the starting solution on the physical properties,” Materials Science in Semiconductor Processing, vol. 15, pp. 232–239, 2012. View at Publisher · View at Google Scholar
  12. M. de la L. Olvera, A. Maldonado, and R. Asomoza, “ZnO:F thin films deposited by chemical spray: effect of the fluorine concentration in the starting solution,” Solar Energy Materials and Solar Cells, vol. 73, no. 4, pp. 425–433, 2002. View at Publisher · View at Google Scholar · View at Scopus
  13. H. Mondragón-Suárez, A. Maldonado, M. de la L. Olvera et al., “ZnO:Al thin films obtained by chemical spray: effect of the Al concentration,” Applied Surface Science, vol. 193, no. 1-4, pp. 52–59, 2002. View at Publisher · View at Google Scholar · View at Scopus
  14. S. Major and K. L. Chopra, “Indium-doped zinc oxide films as transparent electrodes for solar cells,” Solar Energy Materials, vol. 17, pp. 319–327, 1988. View at Publisher · View at Google Scholar
  15. P. Nunes, B. Fernandes, E. Fortunato, P. Vilarinho, and R. Martins, “Performances presented by zinc oxide thin films deposited by spray pyrolysis,” Thin Solid Films, vol. 337, no. 1-2, pp. 176–179, 1999. View at Google Scholar · View at Scopus
  16. A. Tiburcio-Silver, A. Sánchez-Juárez, and A. Avila-García, “Properties of gallium-doped ZnO deposited onto glass by spray pyrolysis,” Solar Energy Materials and Solar Cells, vol. 55, no. 1-2, pp. 3–10, 1998. View at Google Scholar · View at Scopus
  17. B. J. Lokhande, P. S. Patil, and M. D. Uplane, “Studies on structural, optical and electrical properties of boron doped zinc oxide films prepared by spray pyrolysis technique,” Physica B, vol. 302-303, pp. 59–63, 2001. View at Publisher · View at Google Scholar · View at Scopus
  18. G. K. Paul, S. Bandyopadhyay, S.-K. Sen, and S. Sen, “Structural, optical and electrical studies on sol-gel deposited Zr doped ZnO films,” Materials Chemistry and Physics, vol. 79, pp. 71–75, 2003. View at Publisher · View at Google Scholar
  19. A. Guillén-Santiago, M. de la L. Olvera, A. Maldonado, R. Asomoza, and D. R. Acosta, “Electrical, structural and morphological properties of chemically sprayed F-doped ZnO films: effect of the ageing-time of the starting solution, solvent and substrate temperature,” Physica Status Solidi A, vol. 201, no. 5, pp. 952–959, 2004. View at Publisher · View at Google Scholar · View at Scopus
  20. O. G. Morales-Saavedra, L. Castañeda, J. G. Bañuelos, and R. Ortega-Martínez, “Morphological, optical, and nonlinear optical properties of fluorine-indium-doped zinc oxide thin films,” Laser Physics, vol. 18, pp. 283–291, 2008. View at Publisher · View at Google Scholar
  21. C. Barrette and T. B. Massalaski, Structure of Metals, McGraw-Hill, New York, NY, USA, 1966.
  22. B. E. Warren, X-Ray Diffraction, Dover, New York, NY, USA, 1990.
  23. R. Swanepoel, “Determination of the thickness and optical constants of amorphous silicon,” Journal of Physics E, vol. 16, no. 12, pp. 1214–1222, 1983. View at Publisher · View at Google Scholar · View at Scopus