Journal of Coatings / 2013 / Article / Tab 2

Research Article

Properties of TiC Coating by Pulsed DC PACVD

Table 2

Different parameters in plasma nitriding process.

Temp. (°C)Pressure (mbar)Time (min)Hydrogen (sccm)Nitrogen (sccm)Argon (sccm)

4702601600500500

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