Properties of TiC Coating by Pulsed DC PACVD

Table 4

AFM and wear result test.

Sample number	Min. downhill (nm)	Max. downhill (nm)	Average roughness (nm)	Specific wear rate (m^3/Nm) ∗10^−13
1	−46±10	59±10	24±3	10.1
2,5	−47±10	58±10	20±3	3.70
3,4	−43±10	43±10	15±3	3.25