Journal of Control Science and Engineering / 2012 / Article / Fig 3

Research Article

Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate

Figure 3

Surface morphologies of AlN films on polymer substrates under different deposition pressures: (a) 0.38 Pa, (b) 0.47 Pa, and (c) 0.57 Pa.
610160.fig.003a
(a)
610160.fig.003b
(b)
610160.fig.003c
(c)

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