Journal of Control Science and Engineering / 2012 / Article / Fig 5

Research Article

Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate

Figure 5

The measured S21 spectrum of the fabricated SAW resonators with a wavelength of (a) 7.128 μm and (b) 6 μm.
610160.fig.005a
(a)
610160.fig.005b
(b)

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