<svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-4.3443pt" id="M1" height="15.7437pt" version="1.1" viewBox="-0.0657574 -11.3994 26.6531 15.7437" width="26.6531pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-73" d="M828 650H570L564 622C646 614 650 609 634 524L604 366H253L281 524C296 608 308 615 382 622L388 650H132L126 622C211 615 214 609 198 524L121 122C106 42 102 35 23 28L17 0H276L282 28C196 35 191 40 206 122L243 324H597L559 123C544 42 537 35 452 28L446 0H710L716 28C632 35 628 43 643 122L719 524C735 610 741 615 822 622L828 650Z"/></g><g transform="matrix(.012,0,0,-0.012,13.299,4.134)"><path id="g50-30" d="M1000 227C1000 351 905 451 780 451C658 451 590 380 530 279C465 385 388 451 261 451C168 451 38 376 38 210C38 98 121 -12 261 -12C381 -12 448 59 508 160C573 53 652 -12 780 -12C879 -12 1000 64 1000 227ZM485 199C434 109 370 25 271 25C188 25 133 117 133 241C133 355 189 414 249 414C357 414 426 302 485 199ZM903 204C903 70 852 25 790 25C681 25 611 136 552 240C603 330 669 414 768 414C855 414 903 321 903 204Z"/></g></svg> Optimal Inversion Feedforward and Robust Feedback Based 2DOF Control Approach for High Speed-Precision Positioning Systems

<div>The frequency response of <svg height="12.5794pt" id="M269" style="vertical-align:-3.29107pt" version="1.1" viewbox="-0.0498162 -9.28833 28.5077 12.5794" width="28.5077pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M962 650H739L732 622L760 619C812 613 819 604 798 552C760 457 671 267 606 131H604L511 638H480L237 131H233L183 554C177 607 183 614 226 619L248 622L257 650H24L17 622C88 615 92 611 103 524L173 -11H203L450 491H453L543 -11H575L839 529C882 609 886 613 953 622L962 650Z" id="g113-88"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="974" vert-adv-y="974"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,10.777,3.132)"><path d="M329 433H203L239 587L230 596L147 534L123 433H57L30 395L34 388H115L61 129C37 16 59 -12 85 -12C147 -12 222 58 260 98L241 125C212 95 160 62 144 62C132 62 127 71 138 126L192 386L305 394L329 433Z" id="g50-117"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="347" vert-adv-y="347"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,14.445,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="346" vert-adv-y="346"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,18.943,0)"><path d="M352 391C352 416 319 448 267 448C236 448 173 423 147 400C107 364 96 332 96 304C96 248 143 210 193 181C241 153 258 124 258 100C258 72 232 38 184 38C151 38 107 66 81 108C77 114 64 116 55 111C34 99 23 84 23 65C23 29 81 -12 134 -12C220 -12 325 61 325 141C325 184 297 215 234 256C194 282 161 309 161 346C161 380 188 401 217 401C255 401 279 380 301 353C308 344 313 341 325 347C341 355 352 371 352 391Z" id="g113-116"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="375" vert-adv-y="375"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,23.818,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="346" vert-adv-y="346"></glyph.data></g></svg>.</div>

Journal of Control Science and Engineering

fig6

Figure 6

Figure 6: <svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-4.3443pt" id="M1" height="15.7437pt" version="1.1" viewBox="-0.0657574 -11.3994 26.6531 15.7437" width="26.6531pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-73" d="M828 650H570L564 622C646 614 650 609 634 524L604 366H253L281 524C296 608 308 615 382 622L388 650H132L126 622C211 615 214 609 198 524L121 122C106 42 102 35 23 28L17 0H276L282 28C196 35 191 40 206 122L243 324H597L559 123C544 42 537 35 452 28L446 0H710L716 28C632 35 628 43 643 122L719 524C735 610 741 615 822 622L828 650Z"/></g><g transform="matrix(.012,0,0,-0.012,13.299,4.134)"><path id="g50-30" d="M1000 227C1000 351 905 451 780 451C658 451 590 380 530 279C465 385 388 451 261 451C168 451 38 376 38 210C38 98 121 -12 261 -12C381 -12 448 59 508 160C573 53 652 -12 780 -12C879 -12 1000 64 1000 227ZM485 199C434 109 370 25 271 25C188 25 133 117 133 241C133 355 189 414 249 414C357 414 426 302 485 199ZM903 204C903 70 852 25 790 25C681 25 611 136 552 240C603 330 669 414 768 414C855 414 903 321 903 204Z"/></g></svg> Optimal Inversion Feedforward and Robust Feedback Based 2DOF Control Approach for High Speed-Precision Positioning Systems 