Journal of Control Science and Engineering / 2017 / Article / Fig 2

Research Article

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Figure 2

Tension and displacement: (a) displacement of the seeds in top plate; as it is seen, the desired displacement, μm, is not attained due to simplifying assumptions in modeling; (b) stress distribution on top plate due to the applied electrostatic force.
(a)
(b)

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