Review Article

Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials

Figure 8

Calculated reflectivity from a GaAs layer with a thickness of 48 nm on a Si substrate. In the calculation, the interface roughness is 0 nm. Three calculated results are shown for a GaAs surface with an rms roughness of 3.5 nm, 4 nm, and 4.5 nm.
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