Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film
Figure 1
(a) Schematic diagram of the experimental set up: MM—magnetic field coils; —magnetic field; —electric field; Cathode—titanium/stainless steel target; PS—discharge power supply; ER—end reflectors; —langmuir probe; —emissive probe. (b) Schematic diagram of the titanium target cathode.
