Journal of Materials

Volume 2014 (2014), Article ID 430410, 8 pages

http://dx.doi.org/10.1155/2014/430410

Research Article

## Fabrication of Thermoelectric Sensor and Cooling Devices Based on Elaborated Bismuth-Telluride Alloy Thin Films

^{1}LMER Laboratory, Faculty of Sciences, University Ibn Zohr, 80001 Agadir, Morocco^{2}LabSIV Laboratory, Faculty of Sciences, University Ibn Zohr, 80001 Agadir, Morocco^{3}Institut d’Electronique de Sud, IES, Equipe Micro-Capteurs, Université Montpellier II (CC 075), Place E. Bataillon, Cedex 05, 34095 Montpellier, France

Received 6 December 2013; Accepted 6 February 2014; Published 10 March 2014

Academic Editor: Ram Gupta

Copyright © 2014 Abdellah Boulouz et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

#### Linked References

- L. M. Goncalves, C. Couto, P. Alpuim, D. M. Rowe, and J. H. Correia, “Thermoelectric microstructures of ${\text{Bi}}_{\mathbf{\text{2}}}{\text{Te}}_{\mathbf{\text{3}}}$/${\text{Sb}}_{\mathbf{\text{2}}}{\text{Te}}_{\mathbf{\text{3}}}$ for a self-calibrated micropyrometer [thermoelectric cooling],” in
*Proceedings of the 13th International Conference on Solid-State Sensors and Actuators and Microsystems (TRANSDUCERS '05)*, vol. 1, pp. 904–907, Seoul, Republic of Korea, June 2005. View at Publisher · View at Google Scholar · View at Scopus - D. M. Rowe,
*CRC Thermoelecrics Handbook Macro to Nano*, CRC Press, New York, NY, USA, 2006. - A. Dauscher, A. Thorny, and H. Scherrer, “Pulsed laser deposition of Bi
_{2}Te_{3}thin films,”*Thin Solid Films*, vol. 280, no. 1-2, pp. 61–66, 1996. View at Publisher · View at Google Scholar · View at Scopus - G. Delaizir, J. Monnier, M. Soulier et al., “A new generation of high performance large-scale and flexible thermo-generators based on (Bi,Sb)
_{2}(Te, Se)_{3}nano-powders using the Spark Plasma Sintering technique,”*Sensors and Actuators A*, vol. 174, no. 1, pp. 115–122, 2012. View at Publisher · View at Google Scholar · View at Scopus - H. Kaibe, Y. Tanaka, M. Sakata, and I. Nishida, “Anisotropic galvanomagnetic and thermoelectric properties of n-type Bi
_{2}Te_{3}single crystal with the composition of a useful thermoelectric cooling material,”*Journal of Physics and Chemistry of Solids*, vol. 50, no. 9, pp. 945–950, 1989. View at Publisher · View at Google Scholar · View at Scopus - G. S. Nolas, D. T. Morelli, and T. M. Tritt, “SKUTTERUDITES: a phonon-glass-electron crystal approach to advanced thermoelectric energy conversion applications,”
*Annual Review of Materials Science*, vol. 29, pp. 89–116, 1999. View at Publisher · View at Google Scholar - R. Venkatasubramanian, “Lattice thermal conductivity reduction and phonon localizationlike behavior in superlattice structures,”
*Physical Review B*, vol. 61, no. 4, pp. 3091–3097, 2000. View at Publisher · View at Google Scholar - R. Venkatasubramanian, T. Colpitts, B. O'Quinn, S. Liu, N. El-Masry, and M. Lamvik, “Low-temperature organometallic epitaxy and its application to superlattice structures in thermoelectrics,”
*Applied Physics Letters*, vol. 75, no. 8, pp. 1104–1106, 1999. View at Google Scholar · View at Scopus - R. Venkatasubramanian, T. Colpitts, E. Watko, M. Lamvik, and N. El-Masry, “MOCVD of Bi
_{2}Te_{3}, Sb_{2}Te_{3}and their superlattice structures for thin-film thermoelectric applications,”*Journal of Crystal Growth*, vol. 170, no. 1–4, pp. 817–821, 1997. View at Google Scholar · View at Scopus - A. Sackda,
*Study and achievement of thermoelectrical converters. Application to microsensors [Ph.D. thesis]*, University of Montpellier 2, Montpellier, France, 1998. - L. M. Goncalvest, C. Couto, P. Alpuim, D. M. Rowe, and J. H. Correia, “Thermoelectric properties of ${\text{Bi}}_{\mathbf{\text{2}}}{\text{Te}}_{\mathbf{\text{3}}}$/${\text{Sb}}_{\mathbf{\text{2}}}{\text{Te}}_{\mathbf{\text{3}}}$ thin films,”
*Materials Science Forum*, vol. 514–516, no. 1, pp. 156–160, 2006. View at Google Scholar · View at Scopus - L. R. Testardi, J. N. Bierly Jr., and F. J. Donahoe, “Transport properties of p-type ${\text{Bi}}_{\text{2}}{\text{Te}}_{\text{3}}$/${\text{Sb}}_{\text{2}}{\text{Te}}_{\text{3}}$ alloys in the temperature range 80–370°K,”
*Journal of Physics and Chemistry of Solids*, vol. 23, no. 9, pp. 1209–1217, 1962. View at Publisher · View at Google Scholar · View at Scopus - T. Caillat, M. Carle, P. Pierrat, H. Scherrer, and S. Scherrer, “Thermoelectric properties of ${\left(\text{B}{\text{i}}_{\text{x}}\text{S}{\text{b}}_{\text{1}-x}\right)}_{\text{2}}\text{T}{\text{e}}_{\text{3}}$ single crystal solid solutions grown by the T.H.M. method,”
*Journal of Physics and Chemistry of Solids*, vol. 53, no. 8, pp. 1121–1129, 1992. View at Publisher · View at Google Scholar · View at Scopus - F. A. A. Amin, A. S. S. Al-Ghaffari, M. A. A. Issa, and A. M. Hassib, “Thermoelectric properties of fine grained (75% ${\text{Sb}}_{\text{2}}{\text{Te}}_{\text{3}}$-25% ${\text{Bi}}_{\text{2}}{\text{Te}}_{\text{3}}$)
*p*-type and (90% ${\text{Bi}}_{\text{2}}{\text{Te}}_{\text{3}}$-5% ${\text{Sb}}_{\text{2}}{\text{Te}}_{\text{3}}$-5% ${\text{Sb}}_{\text{2}}{\text{Se}}_{\text{3}}$)*n*-type alloys,”*Journal of Materials Science*, vol. 27, no. 5, pp. 1250–1254, 1992. View at Publisher · View at Google Scholar · View at Scopus - A. A. Joraide, “Thermoelectric properties of fine-grained sintered ${\left({\text{Bi}}_{\text{2}}{\text{Te}}_{\text{3}}\right)}_{\text{25}}$-${\left(\text{S}{\text{b}}_{\text{2}}\text{T}{\text{e}}_{\text{3}}\right)}_{\text{75}}$ p-type solid solution,”
*Journal of Materials Science*, vol. 30, no. 3, pp. 744–748, 1995. View at Publisher · View at Google Scholar - X. Fan, J. Yang, W. Zhu, S. Bao, X. Duan, and Q. Zhang, “Thermoelectric properties of p-type Te-doped (Bi,Sb)
_{2}Te_{3}alloys by mechanical alloying and plasma activated sintering,”*Journal of Alloys and Compounds*, vol. 448, no. 1-2, pp. 308–312, 2008. View at Publisher · View at Google Scholar · View at Scopus - H. Noro, K. Sato, and H. Kagechika, “The thermoelectric properties and crystallography of Bi-Sb-Te-Se thin films grown by ion beam sputtering,”
*Journal of Applied Physics*, vol. 73, no. 3, pp. 1252–1260, 1993. View at Publisher · View at Google Scholar · View at Scopus - F. Völklein, V. Baier, U. Dillner, and E. Kessler, “Transport properties of flash-evaporated ${\left(B{i}_{\text{1}}{\text{-}}_{\text{x}}S{b}_{\text{x}}\right)}_{\text{2}}$$T{e}_{3}$ films I: optimization of film properties,”
*Thin Solid Films*, vol. 187, no. 2, pp. 253–262, 1990. View at Google Scholar · View at Scopus - A. Mzerd, F. Tcheliebou, A. Sackda, and A. Boyer, “Improvement of thermal sensors based on Bi
_{2}Te_{3}, Sb_{2}Te_{3}and Bi_{0.1}Sb_{1.9}Te_{3},”*Sensors and Actuators A*, vol. 47, no. 1–3, pp. 387–390, 1995. View at Google Scholar · View at Scopus - L. M. Goncalves, P. Alpuim, and J. H. Correia, “Fabrication of thermoelectric devices by applying microsystems technology,”
*Journal of Electronic Materials*, vol. 39, no. 9, pp. 1516–1521, 2010. View at Publisher · View at Google Scholar - L. M. Goncalves, C. Couto, P. Alpuim, D. M. Rowe, and J. H. Correia, “Thermoelectric microstructures of Bi
_{2}Te_{3}/Sb_{2}Te_{3}for a self-calibrated micro-pyrometer,”*Sensors and Actuators A*, vol. 130-131, pp. 346–351, 2006. View at Publisher · View at Google Scholar · View at Scopus - X. A. Fan, J. Y. Yang, R. G. Chen et al., “Characterization and thermoelectric properties of p-type 25%${\text{Bi}}_{\mathbf{\text{2}}}{\text{Te}}_{\mathbf{\text{3}}}$-75%${\text{Sb}}_{\mathbf{\text{2}}}{\text{Te}}_{\mathbf{\text{3}}}$ prepared via mechanical alloying and plasma activated sintering,”
*Journal of Physics D*, vol. 39, no. 4, article 740, 2006. View at Publisher · View at Google Scholar - P. G. Ganesan and V. D. Das, “Thickness and temperature effects on electrical resistivity of (Bi
_{0.5}Sb_{0.5})_{2}Te_{3}thin films,”*Materials Letters*, vol. 60, no. 17-18, pp. 2059–2065, 2006. View at Publisher · View at Google Scholar · View at Scopus - A. F. Ioffe,
*Physik der Halbleiter*, Akademie, Berlin, Germany, 1960. - F. Mongellaz, A. Fillot, R. Griot, and J. de Lallée, “Thermoelectric cooler for infrared detectors,” in
*Cryogenic Optical Systems and Instruments VI*, vol. 2227 of*Proceeding of the SPIE*, p. 156, Orlando, Fla, USA, June 1994. View at Publisher · View at Google Scholar - L. M. Goncalves, J. G. Rocha, C. Couto et al., “Fabrication of flexible thermoelectric microcoolers using planar thin-film technologies,”
*Journal of Micromechanics and Microengineering*, vol. 17, no. 7, article S168, 2007. View at Publisher · View at Google Scholar · View at Scopus - H. Böttner, J. Nurnus, A. Gavrikov et al., “New thermoelectric components using microsystems technologies,”
*Journal of Microelectromechanical Systems*, vol. 13, no. 3, pp. 414–420, 2004. View at Publisher · View at Google Scholar · View at Scopus - L. W. da Silva and M. Kaviany, “Fabrication and measured performance of a first-generation microthermoelectric cooler,”
*Journal of Microelectromechanical Systems*, vol. 14, no. 5, pp. 1110–1117, 2005. View at Publisher · View at Google Scholar · View at Scopus - G. J. Snyder, J. R. Lim, C.-K. Huang, and J.-P. Fleurial, “Thermoelectric microdevice fabricated by a MEMS-like electrochemical process,”
*Nature Materials*, vol. 2, no. 8, pp. 528–531, 2003. View at Publisher · View at Google Scholar · View at Scopus - H. Böttner, “Micropelt miniaturized thermoelectric devices: small size, high cooling power densities, short response time,” in
*Proceedings of the 24th International Conference on Thermoelectrics (ICT '05)*, pp. 1–8, Clemson, SC, USA, June 2005. View at Publisher · View at Google Scholar · View at Scopus - D. M. Rowe,
*CRC Handbook of Thermoelecrics*, CRC Press, New York, NY, USA, 1995. - H. Zou, D. M. Rowe, and S. G. K. Williams, “Peltier effect in a co-evaporated Sb
_{2}Te_{3}(P)–Bi_{2}Te_{3}(N) thin film thermocouple,”*Thin Solid Films*, vol. 408, no. 1-2, pp. 270–274, 2002. View at Publisher · View at Google Scholar · View at Scopus - T. Shioyama, T. Takiguchi, and S. Ogawa, “Simple vacuum gauge using TaN thin films in the pressure range of 10
^{5}to 10^{−3}Pa,”*Journal of Vacuum Science & Technology*, vol. 15, no. 2, pp. 761–763, 1978. View at Publisher · View at Google Scholar · View at Scopus - F. VolkLein and W. Schnelle, “A vacuum microsensor for the low-vacuum range,”
*Sensors and Materials*, vol. 3, pp. 41–48, 1991. View at Google Scholar