Rutherford Backscattering Spectrometry Analysis and Structural Properties of Thin Films Deposited by Chemical Spray Pyrolysis

Table 4

Computed crystals size and the lattice constants for thin film samples.

Sample	Lattice constant (Å)	Crystal size using Scherer’s formula (nm)	Crystal size using modified Scherer’s formula (nm)	Residual strain
ZPS1	5.942	14	15	3.125 × 10^−3
ZPS2	5.952	13	13	3.22 × 10^−3
ZPS3	5.961	12	13	3.85 × 10^−3
ZPS4	5.973	12	12	5.75 × 10^−3
ZPS5	5.989	11	11	6.70 × 10^−3
ZPS6	5.995	10	10	7.00 × 10^−3