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Journal of Nanomaterials
Volume 2008, Article ID 429168, 9 pages
http://dx.doi.org/10.1155/2008/429168
Research Article

Modeling and Formulation of a Novel Microoptoelectromechanical Gyroscope

Centre for Mechanics, Smart Structure and Micro-Systems, Cape Peninsula University of Technology, Cape Town 7535, South Africa

Received 20 February 2008; Accepted 12 May 2008

Academic Editor: Rakesh Joshi

Copyright © 2008 Bohua Sun et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined inertial sensors,” Proceedings of the IEEE, vol. 86, no. 8, pp. 1640–1658, 1998. View at Publisher · View at Google Scholar
  2. F Ayazi and K. Najafi, “Design and fabrication of a high-performance polysilicon vibrating ring gyroscope,” in Proceedings of the 11th IEEE Annual International Workshop on Micro Electro Mechanical Systems (MEMS '98), pp. 621–626, Heidelberg, Germany, January 1998. View at Publisher · View at Google Scholar
  3. D. Cho, S. Lee, and S. Park, “Surface/bulk micromachined high performance silicon micro-gyroscope,” in Proceedings of the Solid-State Sensor Actuator Workshop, Hilton Head Island, SC, USA, June 2000.
  4. D. Kristiansen and O. Egeland, “Modeling of nonlinear vibrations for analysis and control of cylinder gyroscopes,” in Proceedings of the 37th IEEE Conference on Decision and Control (CDC '98), vol. 4, pp. 4326–4327, Tampa, Fla, USA, December 1998. View at Publisher · View at Google Scholar
  5. T. Juneau, A. P. Pisano, and J. H. Smith, “Dual axis operation of a micromachined rate gyroscope,” in Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers '97), vol. 2, pp. 883–886, Chicago, Ill, USA, June 1997. View at Publisher · View at Google Scholar
  6. J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Maciel, and M. Weinberg, “A micromachined comb-drive tuning fork rate gyroscope,” in Proceedings of the IEEE Annual International Workshop on Micro Electro Mechanical Systems (MEMS '93), pp. 143–148, Fort Lauderdale, Fla, USA, February 1993. View at Publisher · View at Google Scholar
  7. X. Jiang, J. I. Seeger, M. Kraft, and B. E. Boser, “A monolithic surface micromachined Z-axis gyroscope with digital output,” in Proceedings of IEEE Symposium on VLSI Circuits (VLSI '00), pp. 16–19, Honolulu, Hawaii, USA, June 2000. View at Publisher · View at Google Scholar
  8. W. Ecke, P. Pfeifer, J. Schauer, R. Willsch, and K.-H. Jackel, “Fiber optic displacement measuring system for high-temperature seismic sensor,” in Fiber Optic and Laser Sensors XIV, vol. 2839 of Proceedings of SPIE, pp. 290–301, Denver, Colo, USA, August 1996. View at Publisher · View at Google Scholar
  9. “Fiber Optic Interferometer Fabry-Perot,” http://www.physics.nad.ru/sensors/English/interf.htm.
  10. E. J. Eklund and A. M. Shkel, “Factors affecting the performance of micromachined sensors based on fabry-perot interferometry,” Journal of Micromechanics and Microengineering, vol. 15, no. 9, pp. 1770–1776, 2005. View at Publisher · View at Google Scholar
  11. E. Udd, “Fiber optic smart structures,” Proceedings of the IEEE, vol. 84, no. 6, pp. 884–894, 1996. View at Publisher · View at Google Scholar
  12. D. Hofstetter, H. P. Zappe, and R. Dandliker, “Optical displacement measurement with GaAsrAlGaAs-based monolithic integrated Michelson interferometers,” IEEE Journal of Lightwave Technology, vol. 15, no. 4, pp. 663–670, 1997. View at Publisher · View at Google Scholar
  13. H. Lefevre, “Principle of the fiber-optical gyroscope,” in The Fiber Optic Gyroscope, chapter 2, pp. 5–72, Artech House, Boston, Mass, USA, 1993. View at Google Scholar