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Journal of Nanomaterials
Volume 2008, Article ID 964046, 5 pages
Research Article

Enhanced Mechanical Properties in Organofluorosilica Thin Films

1Istituto per lo Studio dei Materiali Nanostrutturati, Consiglio Nazionale delle Ricerche (CNR), Via Ugo La Malfa 153, 90146 Palermo, Italy
2Dipartimento di Ingegneria Chimica dei Processi e dei Materiali, Università degli Studi di Palermo, Viale delle Scienze, 90128 Palermo, Italy
3Laboratoire de Métallurgie Physique, CNRS UMR 6630, Université de Poitiers, téléport 2, boulevard Marie et Pierre Curie, 86962 Futuroscope-Chasseneuil Cedex, France
4Centro de Química-Física Molecular, Complexo I, Instituto Superior Técnico, Avenida Rovisco Pais, 1049-001 Lisboa, Portugal

Received 23 May 2008; Revised 1 August 2008; Accepted 4 September 2008

Academic Editor: Müjdat Çağlar

Copyright © 2008 Mario Pagliaro et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Fluorinated hybrid organic-inorganic silicates (ORMOSIL) thin films display exceptional mechanical properties in terms of both hardness and elastic modulus that can be finely tuned by varying the angular velocity of the spin coating process. Hence, as traditional alkyl-modified silica xerogels generally show poor mechanical behavior, these materials offer a solution to a major limitation to applicability of ORMOSIL-based films.